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v1.0

by José Maria Mateos Melero

  1. 1. SEM and FIB are switched on.  2. Bring sample to coincident point. 3. Center on a border of the grid. 4. FIB apertures have been initialized.
    • 1. SEM and FIB are switched on. 2. Bring sample to coincident point. 3. Center on a border of the grid. 4. FIB apertures have been initialized.

    • In the FIB Control Menu. Select Align tab.

    • Select the 30kV/50pA probe current (reference probe current)

    • Focus the specimen surface: Use Focus and Stigmation. Click on Save.

    • Change the probe current and repeat these steps for each current.

  2. The beam shift correction is used to correct the different beam positions of the different probe current settings. The 30kV:50pA probe current is the reference current where no correction is applied. Select the crosshairs and bring a recognizable feature to the center.
    • The beam shift correction is used to correct the different beam positions of the different probe current settings.

    • The 30kV:50pA probe current is the reference current where no correction is applied.

    • Select the crosshairs and bring a recognizable feature to the center.

    • In the FIB Control/Align tab, select the next smaller probe current from the drop-down menu.

    • If the feature is shifted to another position: Move the feature to the original position by using the beamshift correction. Click on Beam Shift Cor.

    • Move the crosshairs with the sliders.

    • Click on Save to save the adjustments. Repeat these steps for all smaller probe current.

    • Now before adjusting the higher probes switch back to the 30kV/50pA and if necessary center the feature by moving the stage before changing to the following higher currents and proceed as above for the rest of probe currents.

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José Maria Mateos Melero

Member since: 04/28/2019

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16 Guides authored

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