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1. SEM and FIB are switched on. 2. Bring sample to coincident point. 3. Center on a border of the grid. 4. FIB apertures have been initialized.
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In the FIB Control Menu. Select Align tab.
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Select the 30kV/50pA probe current (reference probe current)
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Focus the specimen surface: Use Focus and Stigmation. Click on Save.
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Change the probe current and repeat these steps for each current.
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The beam shift correction is used to correct the different beam positions of the different probe current settings.
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The 30kV:50pA probe current is the reference current where no correction is applied.
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Select the crosshairs and bring a recognizable feature to the center.
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In the FIB Control/Align tab, select the next smaller probe current from the drop-down menu.
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If the feature is shifted to another position: Move the feature to the original position by using the beamshift correction. Click on Beam Shift Cor.
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Move the crosshairs with the sliders.
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Click on Save to save the adjustments. Repeat these steps for all smaller probe current.
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Now before adjusting the higher probes switch back to the 30kV/50pA and if necessary center the feature by moving the stage before changing to the following higher currents and proceed as above for the rest of probe currents.
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