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v2.0

by Joana Raquel Delgado Martins

  1. Loging to microscope computer using SEMUser as user and password. Start "SEM Operation" software
    • Loging to microscope computer using SEMUser as user and password.

    • Start "SEM Operation" software

  2. Press "Specimen exchange". Activate "Specimen exchange" in the popup menu. Activate "Move stage to exchange position" and confirm with "Yes (Y)"
    • Press "Specimen exchange".

    • Activate "Specimen exchange" in the popup menu.

    • Activate "Move stage to exchange position" and confirm with "Yes (Y)"

  3. Open door of instrument using the handle on the right side. Remove sample holder as indicated on the screen.
    • Open door of instrument using the handle on the right side.

    • Remove sample holder as indicated on the screen.

    • Press "OK"

  4. Use regular stubs for Zeiss instruments. Mount on regular Zeiss holder and attach with the screws. Clip Zeiss holder into Jeol carrier. Only one orientation possible.
    • Use regular stubs for Zeiss instruments.

    • Mount on regular Zeiss holder and attach with the screws.

    • Clip Zeiss holder into Jeol carrier. Only one orientation possible.

    • Holder assembly.

    • Measure height of the whole assembly with dedicated tool. Top of sample to bottom distance.

    • It is important to measure correctly.

  5. You must create a new file or open an existing one. For creating, press "Create..." Select proper holder (bright green square: 51 mm).
    • You must create a new file or open an existing one.

    • For creating, press "Create..."

    • Select proper holder (bright green square: 51 mm).

    • Click "Add"

    • Insert name of choice and click "Add" in the popup window.

    • Adjust height measured in the previous step using the slider.

    • Make sure you select the correct height. If value is too low by mistake, the backscatter detector may be damaged.

    • Press "OK" and confirm.

  6. Select observation conditions.
    • Select observation conditions.

    • Press "OK"

  7. Insert sample holder into chamber as indicated on the screen.
    • Insert sample holder into chamber as indicated on the screen.

    • Close door.

    • Press "EVAC" and confirm.

  8. Press "Reacquire Photo" Stage will move to camera position and acquire an image. Pres "OK"
    • Press "Reacquire Photo"

    • Stage will move to camera position and acquire an image.

    • Pres "OK"

    • Select appropriate stage movement. In general "Go to specified area and set WD to 10.0 mm".

    • Select the region of interest by clicking on desired location.

    • Press "Start Observation".

    • Observe the stage movement using the chamber scope.

    • You may interrupt the stage movement if it moves too close towards the lens: purple line (only happens if height not measured properly).

  9. Start imaging by clicking "Observation". Electron beam will be turned on and column valve opens.
    • Start imaging by clicking "Observation".

    • Electron beam will be turned on and column valve opens.

    • Press "Fast" to start scanning/unfreeze.

    • EDX system is always on and measures spectra on the go.

Finish Line

Andres Kaech

Member since: 04/09/2019

382 Reputation

2 Guides authored

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