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v5.0

by José Maria Mateos Melero

  1. Turn on FIB gun. [show button in image with colour].
    • Turn on FIB gun. [show button in image with colour].

    • Blank beam (if not blanked). [show button in image with colour]

    • If emission is below 2uA, turn regulate off.

    • Set FIB Suppressor Target to -200 V and FIB Extractor Target to -9 kV.

    • Open FIB Filament Heating window. [now switch to new step].

  2. Set FIB Fil I Target to 3.700 A.
    • Set FIB Fil I Target to 3.700 A.

    • Press "Filament On".

    • Watch FIB Emission current and wait until it reaches 50.0 uA. [Show in the image where to watch with a colored square]

    • Immediately after reaching 50 µA, press "Filament Off".

  3. Lower the FIB Extr. Target by clicking on the right arrow of the slider once per 2 seconds until the the Emission current reaches 10 µA. It needs several clicks until a change in the Emission current appears. Be patient and keep clicking slowly!
    • Lower the FIB Extr. Target by clicking on the right arrow of the slider once per 2 seconds until the the Emission current reaches 10 µA.

    • It needs several clicks until a change in the Emission current appears. Be patient and keep clicking slowly!

    • at 10 uA wait 5min.

    • Wait 1 min and lower to 5 uA.

    • Wait 1 min and lower to 4 uA.

    • Wait 1 min and lower to 3 uA.

    • Wait 1 min and lower to 2uA.

    • Wait 1 min and turn regulate on again.

José Maria Mateos Melero

Member since: 04/28/2019

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16 Guides authored

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