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v2.0

by José Maria Mateos Melero

  1. Turn on FIB gun. [show button in image with colour]. Blank beam (if not blanked). [show button in image with colour] If emission is below 2uA, turn regulate off.
    • Turn on FIB gun. [show button in image with colour].

    • Blank beam (if not blanked). [show button in image with colour]

    • If emission is below 2uA, turn regulate off.

    • Set FIB Suppressor Target to -200 V and FIB Extractor Target to -9 kV.

    • Open FIB Filament Heating window. [now switch to new step].

  2. Set FIB Fil I Target to 3.600 A.
    • Set FIB Fil I Target to 3.600 A.

    • Press "Filament On".

    • Watch FIB Emission current and wait until it reaches 50.0 uA. [Show in the image where to watch with a colored square]

    • Immediately after reaching 50 µA, press "Filament Off".

    • In case the FIB Emission current does not reach 50 µA, increase the FIB Fil ITarget value to 3.700 A.

  3. Lower the FIB Extr. Target by clicking on the right arrow of the slider once per 2 seconds until the the Emission current reaches 10 µA. It needs several clicks until a change in the Emission current appears. Be patient and keep clicking slowly!
    • Lower the FIB Extr. Target by clicking on the right arrow of the slider once per 2 seconds until the the Emission current reaches 10 µA.

    • It needs several clicks until a change in the Emission current appears. Be patient and keep clicking slowly!

    • at 10 uA wait 5min.

    • Wait 1 min and lower to 5 uA.

    • Wait 1 min and lower to 4 uA.

    • Wait 1 min and lower to 3 uA.

    • Wait 1 min and lower to 2uA.

    • Wait 1 min and turn regulate on again.

José Maria Mateos Melero

Member since: 04/28/2019

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12 Guides authored

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